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Course syllabus

Micro Sensors

EEMN01, 7,5 credits, A (Second Cycle)

Valid for: 2015/16
Decided by: ---
Date of Decision: ---

General Information

Main field: Nanoscience.
Elective for: BME4, D4, E4-ssr, F4, F4-nf, F4-ss, MSOC2, N4-nf
Language of instruction: The course will be given in English on demand


Measurement technology and transducers are important in every field of activity for an engineer. For example, detailed studies of brain signals, detection of light in optical fibres or supervision of process industries. The amount of micro sensors is increased in the society, especially in the automobile industry where airbag sensors, tilt sensors and tire pressure sensors are standard today.

Learning outcomes

Knowledge and understanding
For a passing grade the student must

  • Have theoretical knowledge of different fabrication processes for micro sensors.
  • Be able to explain the function of different detection methods.
  • Be able to choose a suitable sensor design and instruments in a given measurement situation and perform measurements.

Competences and skills
For a passing grade the student must

  • Have gained experience in experimental work.
  • Be able to construct a measurement system in practice.
  • Be able to search, sort out and acquire information from an extensive information material without reading instructions.
  • Be able to report acquired information and experimental results orally and in writing.

Judgement and approach
For a passing grade the student must

  • Be able to critical judge the results to minimize the risk of errors in measurements and misreadings


The course is characterised by experimental and independent work, combined with a series of lectures that presents the fabrication and physical principles of silicon based micro sensors. Laboratory work and project focus on fabrication of silicon micro structures together with studies and characterization of the sensors that you fabricate in the clean room laboratory work. Basic knowledge in process technology for micro mechanical components and sensors will be given. For example, lithography steps and etch methods will be discussed.

Examination details

Grading scale: TH
Assessment: For grade 3 is required teoretical study with written report, passed project and accompished poster presentation. For a higher grade a written exam is given.


Required prior knowledge: EEM007 Mätteknik, EEMN045 Sensorer, EEMF15 Sensorer och Mätteknik, ESSF10 Mätteknik or similar.
The number of participants is limited to: 28
Selection: 1. The specific topic of commenced thesis. 2. Number of credits left until final degree.
The course overlaps following course/s: EEM050

Reading list

  • E-books accessible from the university library.

Contact and other information

Course coordinator: Martin Bengtsson,
Course homepage:

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